May 31, 2019
Installation and testing of gas lines for the reactive-ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) tools is now taking place at MIT.nano. Gas lines run from the distribution boxes called "valve manifold boxes" or VMBs, seen along the wall, to the tool locations (in the chase to the right, out of view).
One of the PECVD tools being connected to gas lines is the SAMCO PECVD. The space around it is quickly filling up with pumps, gas sticks, and other support equipment. Later this summer, the tool will be ramped up and qualified.
