Facility Updates

As part of the Process Cooling Water (PCW) re-installation project, the NanoMat solar frontiers space on the 3rd floor of MIT.nano in 2U (12-3111) will be an active construction area starting Thursday, March 25th.

Read more, including reduced access hours, in this update.

As part of the Process Cooling Water (PCW) re-installation project, the level 3 cleanroom chase corridor and level 3 lab spaces will be parts of an active construction area starting Monday, March 22. This work will interrupt the path from the main gowning area to soft lithography and to ESP lab space. In order to minimize overlap between users and the construction activity, alternate paths to these spaces with be provided.

Read more in this update.

As noticed by MIT.nano users and staff, the MLA-150s have been incredibly booked, but the usage history is not reflecting this demand. As such, MIT.nano staff have established reservation limits of six hours total for prime time (8 a.m. – 9 p.m.) and a maximum of four upcoming reservations.

Read more in this update.

MIT.nano has placed an order for an Elionix HS-50 ebeam writer, as a replacement for the ICL stepper. The HS-50, expected to arrive in October, will be located in the Fab-12 cleanroom on the first floor.

Read more in this update.

The Asher-Barrel-Thierry will go live the first week of March in Building 12. MIT.nano staff have prepared a training video (watch in this update), and posted standard operating procedures (SOP) by the tool. MIT.nano users can find the tool in CORAL: “Asher-Barrel-Thierry” under B-12 / Litho.

Read more.

Beginning in March, MIT.nano will require labeling for all personal chemicals. Researchers should work with MIT.nano Environment, Health, and Safety (EHS) Manager Whitney Hess to identify your approved chemicals if they are missing a label.

Read more in this update.

Fab.nano will be closed on Monday, February 15, 2021 in observance of Presidents' Day. As usual during Institute holidays, the fabs in Bldg. 39 and in Bldg. 12 will not be staffed; therefore, they will be only open to qualified 24-hr users.

MIT.nano has three standard photoresists in Building 12. Learn more, including where to find the recipes, in this update.

Fab.nano will operate under holiday guidelines on Monday, January 18, in observance of Martin Luther King Jr. Day, a national and Institute holiday.