Facility Updates

This update contains information about the general purpose coater for both manual pieces and wafers, the new HMDS oven, and the Semilab ellipsometer.

Find information about new and existing tool training, new user orientations, and wet bench chemical training sessions in this post.

Since July 8, when coming out of the shutdown, there has been significant effort around temperature/humidity and duct smoke detectors. Across over 24 work orders that facilities opened, various issues were documented and resolved. A rough list of control and hardware problems that were addressed are listed in this post.

MIT.nano is looking for new student members on the Processing Technology Committee (PTC). The PTC meets weekly to review and approve new processes as well as all 24-hr status requests. 

There is now a PC in the Fab-12 gowning area to use to run CORAL. Please remember to follow new gowning hanger guidelines and do not put your garments in the hamper.

As MIT approaches phase 2 of the research ramp-up, Fab-12 and Fab-39 will be returning to the full pre-COVID schedule of operation starting on Monday, July 27, 2020.

As we enter week 5 of the MIT.nano ramp-up, our technical team is evaluating how the new gowning procedures have been working out, and what we can do to improve them.

The Semilab field service team will be coming to campus next week to install, qualify, and train the MIT.nano staff on the new Semilab SE-2000 spectroscopic ellipsometer. MIT.nano users are invited to provide sample films that we can model and fit into our library while the Semilab service engineer is onsite.

The next MIT.nano user meeting will be Wednesday July 22. Agenda items include tool specific timelines, updates on new installations, and an open forum for discussion on how things are going since MIT.nano reopened last month.

The Fourth of July holiday, which falls on a Saturday, will be observed by MIT this Friday 7/3 and also Monday 7/6. Read more about building access and hours in this post.