Facility Updates

Fab.nano will be closed for users on Tuesday, January 10, from about 6:00 a.m. to around 3:00 p.m. for a major software upgrade to the building management system (BMS).

After October 1st, samples still stored in Fab-39 (TRL/ICL/EML) will be removed.

Pieces and broken wafers will be discarded, intact 4" and 6" wafers will be sent out for reclaim to help us offer lower-cost test wafers to the community. If you don’t need your old samples, leave them in 39 and they will find good re-use. Otherwise, please pick them up by Friday, September 30.

MIT.nano users should check their email for the weekly digest containing the new rates for evaporators, effective August 1st. Tool use rates themselves are lowered, while precious metal rates are updated to reflect recent purchase prices of metals.

Read more in this update.

The new Temescal evaporator is nearly ready for operation and training at MIT.nano! It accommodates 8” wafers and has eight large material pockets. Read more in this update.

MIT facilities will carry out preventative maintenance work on the building exhaust systems from Monday July 18 until about 2pm on Wednesday, July 20. As a result, the MIT.nano fab will be closed during this time.

Read more in this update.

This summer and fall, MIT.nano staff will heavily focus on helping to move remaining processes over from Fab-39 to 12. This update focuses on what will happen in the month of July. Read more.

On Saturday, May 14, we will celebrate the naming of Building 12, the home of MIT.nano, by Lisa T. Su ’90, SM ’91, PhD ’94, chief executive officer and chair of the Board of Directors of AMD. In the afternoon, we will participate in MIT's Better World Weekend.

To celebrate the naming of the building, the fab will run extended hours for regular / non-24h users on Friday and Saturday. Read more in this update.

The contractors are completing the exhaust installation for the new Arradiance ALD for oxides, and Arradiance will be onsite in the next two weeks to start up the tool and establish recipes.

Read more in this update.

Some questions have come up recently about MIT.nano's gowning order-of-operations. This update explains why we do things the way we do, to keep the cleanroom and your research as pristine as possible!

With MIT easing its mask mandate as of Monday, March 14, MIT.nano is slightly adjusting our gowning entry procedures. Vinyl gloves have been moved back to their pre-pandemic location in the pre-gowning space, and we will supply optional surgical masks instead of the itchy beard-covers we were using before COVID.

Read more in this update.